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Electrochemical-Etching

Si + 4HF2— + h+ -> SiF62- + 2HF + _____ + e—. Complete reaction for dissolution of hydrogen-terminated Si in HF based solution.


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This Chapter Electrochemical-Etching consists of the following topics

To create a neutralized Si–F bound, an electronic hole (h+) is generated.

Si + 4HF2— + h+ -> SiF62- + 2HF + _____ + e—. Complete reaction for dissolution of hydrogen-terminated Si in HF based solution.

In the fabrication of pSi structures, wet chemical etching with alkaline etchants is used.

Si + 4HF2— + h+ -> SiF62- + 2HF + _____ + e—. Complete the reaction for dissolution of hydrogen-terminated Si in HF based solution.

Electrochemical Etching

Manufacturing-Engineering-II