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Electrochemical-Etching

MpSi structures have a random distribution of pores.


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This Chapter Electrochemical-Etching consists of the following topics

According to morphological details, pSi can be divided as sponge-like pSi and pSi featuring cylindrical pores.

MpSi structures have a random distribution of pores.

The resulting pore structure in pSi is intrinsically dependent on the doping level of the Si wafer.

MpSi structures have a random distribution of pores.

Electrochemical Etching

Manufacturing-Engineering-II