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Electrochemical-Etching

Structural features of metal-assisted etched pSi are different for different oxidant.

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This Chapter Electrochemical-Etching consists of the following topics

The structural features of pSi produced by metal-assisted method independent on illumination.

Structural features of metal-assisted etched pSi are different for different oxidant.

Concentration and composition of the etchant electrolyte can affect the features of the etching product.

Structural features of metal-assisted etched pSi are different for different oxidant.

Electrochemical Etching

Manufacturing-Engineering-II