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Electrochemical-Etching

The metal-assisted etching of pSi structures with lithographic deposition technique produces highly ordered geometric features.

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This Chapter Electrochemical-Etching consists of the following topics

The noble metals used in metal assisted approach are deposited by thermal evaporation, electroless deposition, etc. techniques.

The metal-assisted etching of pSi structures with lithographic deposition technique produces highly ordered geometric features.

The resulted pore geometry is the same for all the noble metals.

The metal-assisted etching of pSi structures with lithographic deposition technique produces highly ordered geometric features.

Electrochemical Etching

Manufacturing-Engineering-II